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Facilities in MiNT-SRC

List of equipments at Microelectronics and Nanotechnology –Shamsuddin Research Centre (MiNT-SRC), Block F5 and Microelectronic Cleanroom, Block G3

  1. Aluminum Physical Vapor Deposition module
    ALPVD
  2. Photolithography Module
    Photolithography

  3. Thermal Furnace
    Furnace

  4. Metrology Tools
  5.  Four-Point I-V Measurement
    Probe station

  6. Atomic Force Microscope
    AFM

  7. DC & RF Magnetron Sputtering ( usage schedule and booking, click here)
    DC RF sputtering

  8. Field Emission-Scanning Electron Microscope (FE-SEM) with EDX and E-beam lithography
    FE SEM

  9. Reactive Ion Etching
    RIE

  10. Solar Simulator
    Solar simulator

  11. Micro System Design
    Micro System Design Laboratory

  12. Surface Profiler
    Surface profiler
  13. Contact angle measurement system
    Contact angle measurement
  14. Incubator
    CO2 Incubator
  15. X-Ray Diffraction Spectroscopy
    XRD
  16. UV-VIS Spectrometer
    UV VIS
  17. Thermal evaporator
    Thermal Evaporator
  18. Thermal CVD
    ThermalCVD

Please contact Mdm Faezahana & Mr Syafiq (FE-SEM only) for booking:

Email: faezahana[at]uthm.edu.my / syafiqsolar[at]gmail.com (replace [at] with @)
Tel:(+6)07-453-8611       Fax:(+6)07-453-8530


 

UNS – UTHM Cooperation in Joint Conference and Students Exchange

 source:

https://uns.ac.id/en/uns-update/uns-uthm-cooperation-joint-conference-students-exchange.html